Stanley Electronic Components

What is MEMS?

MEMS is an abbreviation for Micro
Electro
Mechanical
Systems

MEMS is an abbreviation for "Micro Electro Mechannical System" and it is a device/system that includes sensors and actuators.
They incorporates tiny electrical and mechanical elements on a single substrate by applying various microfabrication technologies such as semiconductor manufacturing technology and laser processing technology.

MEMS is a small machine having the following features;

Space Saving

Energy Saving

Resource Saving

What is MEMS mirror?

| MEMS mirror driving method |

MEMS mirror is actuated by;
piezoelectric, electromagnetic, and electrostatic driving method.

MEMS

Scanning Mirror

Piezoelectric
method
A method to actuate mirror by the warping motion caused by application of voltage transmitted to the mirror through the hinge, which is caused by a piezoelectric film deposited on a silicon wafer.
Electromagnetic
method
A method to actuate mirror by passing an electric current through a coil around the mirror in the magnetic field of a magnet.
Electrostatic
method
A method to actuate mirror by electrostatic actuators at both ends of the mirror.

Stanley Electric's MEMS Mirror: Applying Piezoelectric Method

Downsizing: Output power of piezoelectric method becomes more superior as size decreases.

Size and output / comparison with other actuator methods (image)

Stanley Electric's MEMS mirror is applying the piezoelectric method.

| Structure and actuation of MEMS Mirrors |

Advantages of Stanley Electric's MEMS Mirror

Capable of high temperature operation:
Original piezoelectric filming technology -high manufacturing technology-
High resistance to external vibration:
Patented bellows (actuator) structure -high device designing technology-
Enables downsizing:
Original piezoelectric filming technology
→ Stanley Electric offers highly reliable MEMS mirror products through its seamless process from "design and deposition to device manufacturing."

| Structure and actuation of MEMS Mirrors |

	Piezoelectric method	Electromagnetic method	Electrostatic method
Device Appearance
Power per unit	● High 10⁶ - 10⁷N/m²	△ Low 10¹ - 10³N/m²	△ Low 10¹ - 10⁴N/m²
Operating environment temperature	● Automotive qualified 125°C or lower	× Non automotive qualified 100°C or lower	● Automotive qualified 150°C or lower
Seismic Dynamic Resistance	● Automotive qualified High	● Automotive qualified High	× Non automotive qualified Low

Stanley Electric's MEMS Mirror that Meet Automotive Quality Standards

Markets and Applications

Applications where MEMS mirrors may be used include headlamps, intelligent lighting, mobile projectors, and AR glasses.

Illumination/Lighting

Headlamps

Lighting

Projector

Imaging + New application

Head Up Display

AR glass / Smart glass / Mobile devices

Road projection lamp

Projector

Projectors using RGB lasers and MEMS mirrors enable focus-free image projection, and high color gamut regardless of the shape of the projection target (unevenness, distance).
Taking advantage of its small size, the projector function can be embedded in small mobile devices.

Projection principle:

The image is projected by irradiating 3-color RGB lasers onto a MEMS mirror and scanning(= MEMS mirror is moved along horizontal and vertical axes) called raster scan.
Focus-free and wide color gamut expression is possible due to the adoption of lasers as the light source for projection.

| MEMS Mirror Projection Principle |

| Demonstration of Raster Scanning |

AR glass

Stanley Electric's highly reliable MEMS mirrors can also be used in medical AR glasses, for people with low vision and other applications to support their daily lives.
AR glasses are expected to be a next-generation communication platform, and their convenience is expected to increase further along with the evolution of communication technologies such as 5G and 6G.
AR glasses are composed of display light source devices and optical devices. Display light sources generate information images, and optical devices reflect and transmit those information images to the user.
Laser beam scan (LBS) is one of the display light source devices.This method is used in combination with our MEMS mirrors.

| Laser beam scanning method |

Lighting

Achieving active laser irradiation, that can freely manipulate light and change the irradiated area as needed.
None mechanical parts are used (motors nor other actuators).
→ Downsizing is available. Capable of "spreading," "collecting," and " controlling" light as needed.
Applications:
Stage lighting for entertaining purposes, emergency lighting, security lighting, adaptive headlights for automobiles, etc.

・Wide range of irradiation angles
・Adjustable light intensity
・Adjustable irradiation position and shapes

| Laser beam scanning method |

| Image of projecting |Capable of forming random shapes and high-brightness areas

Lineup of MEMS mirror
(Under Development)

Spec of MEMS mirror device (Reference range)

Parameter		Symbol	Data value			Data value			Unit	Remark
			Model 1			Model 2
Parameter		Symbol	Min	Typ.	Max	Min	Typ.	Max	Unit	Remark
H-axis	Resonant Frequency	fh	35	36.5	38	21	21.5	22	kHz
	Driving voltage	Vh	11	13.6	17.3	9.9	13.5	18.8	V	Sinusoidal wave (Resonance mode), at Maximum mechanical deflection angle
	Mechanical deflection angle	Θh	-11	-	+11	-10	-	+10	degree
V-axis	Resonant Frequency	fv	-	736	-	-	1,074	-	Hz
	Driving voltage	Vv	41	52.3	63.5	35.7	47.1	58.5	V	Sawtooth wave or Triangular wave (Non-resonant mode), at Maximum mechanical deflection angle
	Mechanical deflection angle	Θv	-6	-	+6	-3	-	+3	degree
Mirror	Size	A	Φ1.06			Φ1.46 × 1.61			mm
	Reflectivity B	Rb	90	-	-	96	-	-	%	440-460nm
	Reflectivity G	Rg	90	-	-	-	-	-	%	510-525nm
	Reflectivity R	Rr	90	-	-	-	-	-	%	632-643nm
Resolution			1,219 x 840			1,164 x 467			p

※Please note that these specifications are subject to change without notice.

The optical deflection angle is twice the mechanical deflection angle.

Spec of MEMS mirror package (Reference range)

Parameter	Data value			Data value			Unit	Remark
	Metal package			Ceramic package
Parameter	Min	Typ.	Max	Min	Typ.	Max	Unit	Remark
Incident angle of LD		17.5			45		degree
Operating temperature	-40	-	125	-10	-	70	℃	No dew condensation
Storage temperature	-40	-	125	-40	-	125	℃	No dew condensation
Package size	42.1 x 10 x 4.26			15.6 x 7.8 x 2.52			mm
Weight	4.9			0.8			g