Piezoelectric MEMS Scanning Mirror Device

What is MEMS?

MEMS is an abbreviation for Micro
Electro
Mechanical
Systems

MEMS is an abbreviation for "Micro Electro Mechannical System" and it is a device/system that includes sensors and actuators.
They incorporates tiny electrical and mechanical elements on a single substrate by applying various microfabrication technologies such as semiconductor manufacturing technology and laser processing technology.

MEMS is a small machine having the following features;

Space Saving

Energy Saving

Resource Saving

What is MEMS mirror?

| MEMS mirror driving method |

MEMS mirror is actuated by;
piezoelectric, electromagnetic, and electrostatic driving method.

MEMS

Scanning Mirror

Piezoelectric
method
A method to actuate mirror by the warping motion caused by application of voltage transmitted to the mirror through the hinge, which is caused by a piezoelectric film deposited on a silicon wafer.
Electromagnetic
method
A method to actuate mirror by passing an electric current through a coil around the mirror in the magnetic field of a magnet.
Electrostatic
method
A method to actuate mirror by electrostatic actuators at both ends of the mirror.

Stanley Electric's MEMS Mirror: Applying Piezoelectric Method

Downsizing: Output power of piezoelectric method becomes more superior as size decreases.

Size and output / comparison with other actuator methods (image)

Stanley Electric's MEMS mirror is applying the piezoelectric method.

| Structure and actuation of MEMS Mirrors |

Advantages of Stanley Electric's MEMS Mirror

Capable of high temperature operation:
Original piezoelectric filming technology -high manufacturing technology-
High resistance to external vibration:
Patented bellows (actuator) structure -high device designing technology-
Enables downsizing:
Original piezoelectric filming technology
→ Stanley Electric offers highly reliable MEMS mirror products through its seamless process from "design and deposition to device manufacturing."

| Structure and actuation of MEMS Mirrors |

	Piezoelectric method	Electromagnetic method	Electrostatic method
Device Appearance
Power per unit	● High 10⁶ - 10⁷N/m²	△ Low 10¹ - 10³N/m²	△ Low 10¹ - 10⁴N/m²
Operating environment temperature	● Automotive qualified 125°C or lower	× Non automotive qualified 100°C or lower	● Automotive qualified 150°C or lower
Seismic Dynamic Resistance	● Automotive qualified High	● Automotive qualified High	× Non automotive qualified Low

Stanley Electric's MEMS Mirror that Meet Automotive Quality Standards

Markets and Applications

Applications where MEMS mirrors may be used include headlamps, intelligent lighting, mobile projectors, and AR glasses.

Illumination/Lighting

Headlamps

Lighting

Projector

Imaging + New application

Head Up Display

AR glass / Smart glass / Mobile devices

Road projection lamp

Projector

Projectors using RGB lasers and MEMS mirrors enable focus-free image projection, and high color gamut regardless of the shape of the projection target (unevenness, distance).
Taking advantage of its small size, the projector function can be embedded in small mobile devices.

Projection principle:

The image is projected by irradiating 3-color RGB lasers onto a MEMS mirror and scanning(= MEMS mirror is moved along horizontal and vertical axes) called raster scan.
Focus-free and wide color gamut expression is possible due to the adoption of lasers as the light source for projection.

| MEMS Mirror Projection Principle |

| Demonstration of Raster Scanning |

AR glass

Stanley Electric's highly reliable MEMS mirrors can also be used in medical AR glasses, for people with low vision and other applications to support their daily lives.
AR glasses are expected to be a next-generation communication platform, and their convenience is expected to increase further along with the evolution of communication technologies such as 5G and 6G.
AR glasses are composed of display light source devices and optical devices. Display light sources generate information images, and optical devices reflect and transmit those information images to the user.
Laser beam scan (LBS) is one of the display light source devices.This method is used in combination with our MEMS mirrors.

| Laser beam scanning method |

Lighting

Achieving active laser irradiation, that can freely manipulate light and change the irradiated area as needed.
None mechanical parts are used (motors nor other actuators).
→ Downsizing is available. Capable of "spreading," "collecting," and " controlling" light as needed.
Applications:
Stage lighting for entertaining purposes, emergency lighting, security lighting, adaptive headlights for automobiles, etc.

・Wide range of irradiation angles
・Adjustable light intensity
・Adjustable irradiation position and shapes

| Laser beam scanning method |

| Image of projecting |Capable of forming random shapes and high-brightness areas

Lineup of Starter Kits

	Type A	Type B	Type C
	Built-in type	Separate type	MEMS with driver circuit
Optical Alignment	Implemented	Required	Required
LD	Included	Included	Not included
Layout
Package Form	Ceramic package (No seal)	Ceramic package (No seal) or Metal package (Hermetic seal)	Ceramic package (No seal) or Metal package (Hermetic seal)
Operating method	Piezoelectric operating method
Other Spec	Model 1 Model 2
	Optical Swing Angle　H × V = ±22 × ±12 [deg.] Optical Swing Angle　H × V = ±20 × ±6 [deg.] OR
	Resonant Frequency　H × V = 36±1kHz × >700Hz Resonant Frequency　H × V = 21.5±0.5kHz × >1kHz
	Mirror Size　Φ 1 mm Mirror Size　Φ 1.48 mm × 1.63 mm

*Please note that these specifications are subject to change without notice.

Stanley Electric's MEMS Mirror Starter Kit is available in 3 types, depending on the application that customers are considering. And can be used as a suitable evaluation tool for product planning and development. Please feel free to contact us if you have any requests or questions.

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